Special Optics Telecentric F-Theta UV Scanning lenses offer greater depth of field and smaller spot sizes when marking objects for laser material processing. Telecentric scanning lenses, by the very nature of their design, maintain a near normal incidence angle of the beam to the work piece. This ensures that position errors and image distortions are minimized over the entire scan range. With the shorter wavelength, a smaller spot size is achievable.

Having a greater depth of field and smaller spot size are important for precision laser micro-machining processes where there is a need to produce fine spot sizes so as to control the width of a laser mark, scribe or drilled hole while maintaining precise placement over a relatively large field. The ability to accomplish this is sometimes affected by minimal warping of a wafer or solar panel.

• Focal lengths of 34mm, 50mm, and 100mm, available for 266nm or 355nm wavelengths 
• Scan fields range from 9mm, 20mm, 45mm, and 55mm 
• Developed to accommodate large input beam diameters ranging from 17mm to 10mm 
• Spot sizes achieved are 1.0 microns, 2.5 microns, and 5 microns respectively 
• Diffraction limited and deviation of the telecentricity is less than 0.9%

Features

• Diffraction-limited design
• Precision Manufacture and Assembly
• Air-Spaced Design
• Achromatic Designs Available

Contact us to discuss your needs.

Special Optics high precision F-Theta scanning lenses (450nm to 1064nm) achieve ultra-fine resolution laser cutting and etching and are used in the most demanding laser micro-machining applications. The Special Optics F-Theta scanning lenses are ideally used in combination with our large output beam expanders for a variety of laser processing and laser micro-machining tasks such as cutting of solar cells, laser marking, laser drilling and laser scribing. In addition to the lenses listed, Special Optics regularly designs custom laser optical systems for a large variety of OEM applications and performance levels.

Call us at 973.366.7289 or email us at sales.specialoptics@ametek.com to speak with one of our leading optical designers.

Features

• Provide a Flat Field at the Image Plane
• Diffraction Limited Performance
• Air Spaced Designs for High Damage Threshold
• Anti-reflection Coatings on All Surfaces
• Designs From the Visible to Infrared Regions
• Achromatic Designs Available